Work

Far-field deep sub-wavelength defect sensing using conjugate structured illumination microscopy (c-SIM)

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3062339

Authors: Jinsong Zhang, Hao Jiang, Jian Wang, Shiyuan Liu, Jinlong Zhu

Institutions: Huazhong University of Science and Technology, Optics Valley Laboratory

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413123393

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