Comparative simulation study of computational imaging microscopy for nanoscale defect measurement
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3062689
Authors: Hyo Mi Park, Ki-Nam Joo, Bryan M. Barnes, Martin Y. Sohn
Language: English
Subfield: Radiation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413123408
