Efficient deep-learning ResNet architectures for Mueller-matrix Fourier scatterometry
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3066282
Authors: Liwei Fu, Xiwei Wang, Karsten Frenner, Stephan Reichelt
Institution: University of Stuttgart
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413123440