Work

Mapping and correcting residual flatness errors in optical metrology for high precision surface measurements (Conference Presentation)

Year: 2025

Type: conference-abstract

DOI: 10.1117/12.3062603

Authors: Lena Zhukova, Roger Artigas, Guillem Carles

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413124563

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