Work

Smart ellipsometry: artificial intelligence for thin film characterization

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3066416

Authors: Shuo Liu, Xiuguo Chen

Institutions: Huazhong University of Science and Technology, Optics Valley Laboratory

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413124576

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