Work

Scatterometric defect detection of nanowire surfaces: evaluating the effect of sensor position density

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3062232

Authors: Tajim Md Hasibur Rahman, Dirk Stöbener, Mehdi Abdollahpour, Carsten Bockelmann, Andreas Fischer

Institution: University of Bremen

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413124766

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