Work

Implementation of quad detection scheme in coherent Fourier scatterometry for inspection of patterned structures

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3062040

Authors: Anubhav Paul, Silvania F. Pereira

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413125018

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