Work

Multifunctional coherence scanning interferometric microscopy and measuring techniques

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3065944

Authors: Cheng Chen, Rong Su

Institution: Shanghai Institute of Optics and Fine Mechanics

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413125050

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