Development of a 5D nanopositioning and nanomeasuring machine concept for precise measurement and fabrication of complex free-form surfaces
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3062404
Institution: Technische Universität Ilmenau
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413127125
