Comparison of the approximate Beckmann-Kirchhoff and a rigorous scattering model for coherence scanning interferometry modelling
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3063131
Institutions: University of Nottingham, University of Stuttgart
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413127171
