Machine learning-driven analysis of thickness variations in multilayer thin film coatings for photonics
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3060414
Authors: Qing Liu, Tigran Baghdasaryan, Heidi Ottevaere
Institution: Vrije Universiteit Brussel
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413127254