Work

Spatial convergence analysis on model-based optical critical dimension metrology of high-aspect ratio holes

Year: 2025

Type: article

Abstract: We investigated the error caused by the rasterization of the model region in 3D rigorous coupled-wave analysis (RCWA) simulations of high-aspect ratio holes compared to an analytical Fourier series expansion. We found that the best approach is to calculate an effective medium approximation for each sampling cell, and that there is an optimal spatial resolution and number of subcells for the different truncation orders.

Source: Optics Express

DOI: 10.1364/oe.566360

Authors: József Szenka, Boglárka Dikó, Emeric Balogh, Tamás Szarvas, Pál Koppa

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funder: Nemzeti Kutatási, Fejlesztési és Innovaciós Alap

OpenAlex ID: W4413129489

FWCI: 0.617

Cites: 20

Cited by: 3

Related to: 10