Work

Enhanced polarization switching and reliability in BEOL-compatible HZO/ZrO2/HZO stack under low-voltage operation

Year: 2025

Type: article

Source: Applied Physics Letters

DOI: 10.1063/5.0280876

Authors: Yinchi Liu, Handong Zhu, Xun Lu, Shiyu Li, Hao Zhang, Jining Yang, Yeye Guo, Yanxi Li, Lin Chen, Shijin Ding, Hongliang Lu, Wenjun Liu

Institution: Fudan University

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDGs: Affordable and clean energy, Industry, innovation and infrastructure

Open Access status: closed

Funders: Science and Technology Commission of Shanghai Municipality, National Key Research and Development Program of China

Awards: G3493594101, G5577721409

OpenAlex ID: W4413164634

FWCI: 0.227

Cites: 16

Cited by: 1

Related to: 10