Effects of plasma treatments on Ohmic formation for N polarity of n+-GaN substrates
Year: 2025
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0278116
Authors: Xinke Liu, Kangkai Fan, Yeying Huang, Zhanwu Yang, Lixuan Chen, Hezhou Liu, Xiaohua Li
Institution: Shenzhen University
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Award: G3651175047
OpenAlex ID: W4413165491