Work

Numerical Study on Flow Field in CVD Reactor based on Baffle Shape of Showerhead

Year: 2025

Type: article

Source: Transactions of the Korean Society of Mechanical Engineers B

DOI: 10.3795/ksme-b.2025.49.8.477

Authors: Min Sang Yoo, Ji Hong Chung, Dong-Kee Sohn, Han-Seo Ko

Language: English

Topic: Heat and Mass Transfer in Porous Media

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413181123

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