Work

Nanolithographic Waveguides, Couplers and Ring Resonators made of Si3N4 and AIN for Photonics and Quantum Technologies

Year: 2025

Type: conference-paper

DOI: 10.1109/ssi65953.2025.11107193

Authors: Julia Wecker, Franz Tank, Sebastian Schermer, Chris Stöckel, Christian Helke, Alexey Shaporin, Anne-Katrin Schumann, Jörg Martin, Roman Forke, Karla Hiller, Micha Haase, Alexander Weiβ, Danny Reuter

Institutions: Fraunhofer Institute for Electronic Nano Systems, Chemnitz University of Technology

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Ministry of Education

OpenAlex ID: W4413204441

FWCI: 2.358

Cites: 12

Cited by: 1

Related to: 10