Multiphysics Finite Element Analysis of a U-Shaped Thermal Microactuator for MEMS Applications
Year: 2025
Type: conference-paper
Authors: Dhananchezhian Uthiratchan, Vijayakumar Krishnan, Karthick B, B Balasundaram, Prabakaran Balakrishnana
Institution: Saveetha University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413204602