A Compact Millimeter-Wave Multilayer Mems Bandpass Filter on High-Resistivity Silicon Substrate
Year: 2025
Type: conference-paper
Authors: Chanqi Huang, Hui-Yang Li, Jin-Xu Xu, Xiu Yin Zhang
Institution: South China University of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413205789