Ultra-low-loss photonic integrated chips on an 8-inch anomalous-dispersion Si 3 N 4 -SiO 2 -Si wafer
Year: 2025
Type: article
Source: Optics Letters
DOI: 10.1364/ol.573741
Authors: Shuai Liu, Matthew W. Puckett, Jianfeng Wu, Abdulkarim Hariri, Yuheng Zhang, Abdur-Raheem Al-Hallak, Ruhi Yusuf, Zheshen Zhang
Institutions: University of Michigan, Honeywell (United States)
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413217704
