Single-Mask Embedded Trace Redistribution Layer Technology Using Grayscale Lithography
Year: 2025
Type: article
Authors: Wonchul Do, Sanghyun Jin, Insoo Choi, Jinho Jeong
Institution: Sogang University
Language: English
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413277722