Initial Growth Mechanism and Microstructural Evolution of Sub-10 nm Hydrogenated Amorphous Silicon Films
Year: 2025
Type: article
Authors: Jin Young Lee, Jeong-Ho An, Seo Woo Sim, Do Hoe Kim, Yongrae Kim, Yun-Tak Han, Seung Min Park, Si Hyeong Lee, Ki Joon Seong, Soong Ju Oh, Junghan Lee, Hee-eun Song, Joon-Ho Oh, Ka-Hyun Kim
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G2199331354, G3460978182, G4958807828
OpenAlex ID: W4413304976
