Work

Design and fabrication of AlN thin film based bulk acoustic wave filters targeting the 2.3 GHz frequency band

Year: 2025

Type: article

Source: Physica Scripta

DOI: 10.1088/1402-4896/adfcc1

Authors: Xinyang Ma, Qinwen Xu, Yi Cai, Yaxin Wang, Binghui Lin, Chao Gao, Yuqi Ren, Yupeng Zheng, Yao Cai, Chengliang Sun

Institutions: Wuhan University, Nanchang Hangkong University, Wuhan Institute of Quantum Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Large-Scale Instrument and Equipment Sharing Foundation of Wuhan University

Award: G2549752415

OpenAlex ID: W4413308015

FWCI: 0.237

Cites: 30

Cited by: 1

Related to: 10