Vibration Performance Analysis and Improvement of MEMS Resonant Accelerometers
Year: 2025
Type: article
Authors: Yukun Ma, Haonan Li, Yunfeng Liu, Rong Zhang, Fengtian Han
Institution: Tsinghua University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G126607233
OpenAlex ID: W4413319090