Work

Piezoelectric Micromirror with Integrated Resonant Sensor

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111115

Authors: Takashi Sasaki, Adrien Piot, Rodrigo T. Rocha, Anton Lagosh, Sara R.P. Guerreiro, Clément Fleury, Dominik Holzmann, Aleš Travnik

Institution: Silicon Austria Labs (Austria)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413319904

FWCI: 4.717

Cites: 11

Cited by: 2

Related to: 10