Work

A Glass-Based Paraffin Micro Actuator Array for Ultra-Low Flowrate Micropump

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109553

Authors: Jingzhe Cao, Fade Hu, Lei Li, Chuan Luo

Institutions: Tsinghua University, Beijing Information Science & Technology University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413319937

FWCI:

Cites: 15

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Related to: 10