Work

A Mems-Based Electrochemical Vibration Sensors with Optimized Flow-Resistance and High-Reliability Sensitive Unit

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109126

Authors: Nan Zhang, Xiaoyu Qi, Yan Zhao, Lihao Ma, Xu Ma, Zhenchuan Yang, Chengchen Gao

Institution: Peking University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413319944

FWCI:

Cites: 6

Cited by:

Related to: 10