Reactive Bonding by the use of Nanolayer Stacks on LTCC Substrates
Year: 2025
Type: conference-paper
Institutions: Saarland University, Technische Universität Ilmenau
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W4413319983