Work

An In-Line Method for Extracting and Mapping CD-Loss and Side-Wall Angle in DRIE

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109908

Authors: Xufeng Wang, Leijian Cheng, Peng Liu, Jiakang Li, Shiyang Yuan, Xuanqing Hua, Jiawei Zhou, Yi Chen, Dacheng Zhang

Institution: Peking University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413320036

FWCI:

Cites: 3

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Related to: 10