Work

Highly Accurate Wide-Range MEMS Hybrid Vacuum Sensor with Highly Accurate Gas Identification

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11110624

Authors: Jingping Qiao, Binbin Jiao, Sibo Li, Ruiwen Liu, Yanmei Kong, Yunxin Ye, Xin Liu, Zilong Wang

Institutions: Chinese Academy of Sciences, Institute of Microelectronics, Xi'an Shiyou University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Award: G3363167623

OpenAlex ID: W4413320048

FWCI:

Cites: 9

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Related to: 10