Work

2D Pattern Projection for Mode Coupling Analysis in Gimbal-Less Piezo-Actuated Resonant Scanning Micromirrors

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111511

Authors: Adrien Piot, Sara R.P. Guerreiro, Rodrigo T. Rocha, Clément Fleury, Takashi Sasaki, Anton Lagosh, Aleš Travnik, Dominik Holzmann, Markus Bainschab

Institution: Silicon Austria Labs (Austria)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Silicon Austria Labs, Steirische Wirtschaftsförderungsgesellschaft

OpenAlex ID: W4413320162

FWCI: 2.358

Cites: 5

Cited by: 1

Related to: 10