Work

High-Performance Solidly Mounted Bidimensional Mode Resonators (S2MRs) Operating Around 16 GHz

Year: 2025

Type: conference-paper

Abstract: This paper reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) utilizing 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC), operating near 16 GHz. Experimental results show mechanical quality factors$(Q_{m})$up to 380, electromechanical coupling coefficients$(k_{t}^{2})$of 4%, and an overall Figure of Merit$(F0M=Q\cdot k_{\tau}^{2})$exceeding 15. Additionally,$Q_{Bode}$calculation is reported along with an analysis of the piezoelectric energy confinement coefficient$\eta$showing the impact of thickness-to-wavelength ratio$(h/\lambda)$on the acoustic wave confinement. Finally, the devices demonstrate power handling capabilities greater than 20 dBm while achieving close impedance matching to$50 \Omega$. These features make them strong candidates for commercial, military, and harsh-environment applications like satellite communications (SATCOM) and Active Electronically Scanned Arrays (AESA).

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111564

Authors: Luca Spagnuolo, Luca Colombo, Kapil Saha, Gabriel Giribaldi, Pietro Simeoni, Matteo Rinaldi

Institution: Northeastern University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: Defense Advanced Research Projects Agency, Office of Naval Research

Award: G458257171