Work

Over 90% Reduction of Response Time in Flexible MEMS Thermal Sensor Using Localized Backside Laser Ablation

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109315

Authors: Muhammad Salman Al Farisi, Yoshihiro Hasegawa, Mitsuhiro Shikida

Institution: Hiroshima City University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413320349

FWCI:

Cites: 11

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Related to: 10