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Electron Beam Spot Intensity Uniformity Detection System Based on Suspended NANO Photographic Plates

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109245

Authors: Shiyang Yuan, Fengjun Yu, Xuanqing Hua, Jiawei Zhou, Peng Liu, Dacheng Zhang

Institution: Peking University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413320474

FWCI:

Cites: 8

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Related to: 10