Work

Cascade-Actuation Uncoupled-Motion XYZ-Microstage with Monolithic Integration of In-Plane Comb-Drive XY-Microstage and Out-of-Plane Al/SiO2 Bimorph Thermoelectric Actuators

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111270

Authors: Huanyu Dai, Zengyi Wang, Penghong Shi, Junyang Ding, Bing Li, Gaopeng Xue

Institution: Harbin Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G2520516652, G257058661

OpenAlex ID: W4413320537

FWCI:

Cites: 13

Cited by:

Related to: 10