Work

Non-SOI (111) Wafer Single-Side Microfabrication of Silicon-Based Resonant Structure Inside Vacuum Chamber for Tiny-Size, High-Performance and Low-Cost Resonant Differential Pressure Sensors

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109589

Authors: Yubo Tian, Jiachou Wang, Xinxin Li

Institutions: Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413320662

FWCI:

Cites: 17

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Related to: 10