Silicon Photonics Switch with Electrostatic MEMS Actuator and Zero Power Consumption in Steady State
Year: 2025
Type: conference-paper
Authors: Jyun-Yan Luo, Jin-Jia Ye, Shih-Yi Yeh, Chun-Wei Tsai
Institution: National United University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413320680
