Work

A Resonant Pressure Sensor Based on Wedge-Shaped Comb Excitations

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11110009

Authors: Wei Jiang, YuLan Lu, Bo Xie, DeYong Chen, JunBo Wang, Jian Chen, Nan Li

Institutions: Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Aerospace Information Research Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G1721133597

OpenAlex ID: W4413320706

FWCI:

Cites: 5

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Related to: 10