PT-PT Bonding for High-Temperature Integrated Resonant Pressure Sensors
Year: 2025
Type: conference-paper
Authors: Tanya Chauhan, Seyyed Mojtaba Hassani Gangaraj, Azadeh Ansari
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4413320717