Year: 2025
Type: conference-paper
Abstract: In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12–18 GHz) is demonstrated. Thanks to the high acoustic velocity and low-loss diamond substrate, the prototype resonator at 12.9 GHz achieves a high phase velocity$(\nu_{\mathrm{p}})$of 8671 mis, a maximum Bode-Q of 408, and coupling coefficient$(k_{\mathrm{e}\mathrm{f}\mathrm{f}}^{2})$of 2.1 %, outperforming high-velocity substrates such as SiC and sapphire by more than 20% in velocity. Resonators spanning 8 to 18 GHz are presented. The platform's high power handling above 12.5 dBm is also experimentally validated.
Authors: Tzu-Hsuan Hsu, Kapil Saha, Jack Kramer, Omar Barrera, Pietro Simoni, Matteo Rinaldi, Ruochen Lu
Institutions: The University of Texas at Austin, Northeastern University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4413320798