Work

Laser Micromachined 3D-Shaped Free-Standing Structures on Flexible Substrate for Thermal Flow Sensor

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111450

Authors: Mohammad Nizar Bin Mohamed Zukri, Muhammad Salman Al Farisi, Yoshihiro Hasegawa, Mitsuhiro Shikida

Institution: Hiroshima City University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413320806

FWCI: 2.358

Cites: 8

Cited by: 1

Related to: 10