Work

A Silicon Resonant Pressure Sensor with 180 MPA Capability for Extreme Environments

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111369

Authors: Pengxiang Ye, Zongze Yu, Zhaoyuan Tan, Bo Xie, Yulan Lu, Nan Li, Deyong Chen, Junbo Wang, Jian Chen

Institutions: Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Aerospace Information Research Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Youth Innovation Promotion Association of the Chinese Academy of Sciences, National Key Research and Development Program of China

Awards: G1721133597, G6510892176, G6820209438

OpenAlex ID: W4413320947

FWCI: 2.358

Cites: 3

Cited by: 1

Related to: 10