Integrated Microlens Array on $6 \times 6$ Arrayed Photodetector with Photomask Alignment-Less Process
Year: 2025
Type: conference-paper
Authors: Y. Ohnuki, T. Umezawa, N. Yamamoto, K. Akahane, T. Kawanishi
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G5607951668, G7410102624
OpenAlex ID: W4413320963
