Work

From Stress to Success: Demonstrating Ultrahigh Quality Factor Dual-Shell Resonator Gyroscopes with Low Stress Topology

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109118

Authors: Lois Meira Lopez, Austin R. Parrish, Esther Wong, Danmeng Wang, Andrei M. Shkel

Institution: University of California, Irvine

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413320967

FWCI: 4.717

Cites: 10

Cited by: 2

Related to: 10