Work

Toward a Self-Powered MM-Scale MEMS Sensor Platform through Heterogeneous Integration of SCUM and HV SOI CMOS

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11110444

Authors: Yichen Liu, Daniel Lovell, Titan Yuan, Kristofer S.J. Pister

Institution: University of California, Berkeley

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4413321016

FWCI:

Cites: 7

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Related to: 10