Work

Towards a VOCS Sensing Array via Batch-Compatible Post-CMOS Thiol Functionalization on CMOS-MEMS Monolithic Resonators

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109496

Authors: Pedro Llinàs, Rafel Perelló-Roig, Jaume Verd, Bartomeu Soberats, Salvador Barceló, Sebastià Bota, Jaume Segura

Institution: Universitat de les Illes Balears

Language: English

Topic: Advanced Chemical Sensor Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413321379

FWCI:

Cites: 10

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Related to: 10