Work

Thin-Film Scandium Aluminum Nitride Bulk Acoustic Resonator with High Q of 208 and K2 of 9.5% at 12.5 GHz

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11110376

Authors: Sinwoo Cho, Yinan Wang, Eugene Kwon, Lezli Matto, Omar Barrera, Michael Liao, Jack Kramer, Tzu-Hsuan Hsu, Vakhtang Chulukhadze, Ian Anderson, Mark Goorksy, Ruochen Lu

Institutions: The University of Texas at Austin, University of California, Los Angeles

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W4413321642

FWCI: 2.809

Cites: 42

Cited by: 1

Related to: 10