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First Demonstration of Silicon Carbide Microphone
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Year:
2025
Type:
conference-paper
Source:
International Conference on Solid-State Sensors, Actuators and Microsystems
DOI:
10.1109/transducers61432.2025.11111033
Authors:
Siti Aisyah Zawawi,
Azrul Azlan Hamzah,
Burhanuddin Y. Majlis,
Faisal Mohd-Yasin
Institutions:
Universiti Teknologi MARA,
National University of Malaysia,
Griffith University
Language:
English
Topic:
Advanced MEMS and NEMS Technologies
Subfield:
Electrical and Electronic Engineering
Field:
Engineering
Domain:
Physical Sciences
Open Access status:
closed
OpenAlex ID:
W4413321664
FWCI:
Cites:
7
Cited by:
Related to:
10