Work

A Multi-Stress Concentrated Butterfly Electrode MEMS Acoustic Sensor with High Sensitivity in Infrasound

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11111504

Authors: Zhiyue Yang, Lixuan Li, Zhiyong Hu, Tao Ruan, Hanshuo Liu, Fangtao Kuang, Jingquan Liu

Institution: Shanghai Jiao Tong University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Shanghai Jiao Tong University, Fundamental Research Funds for the Central Universities

Award: G1231589958

OpenAlex ID: W4413321878

FWCI:

Cites: 7

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Related to: 10