Work

Deflection Characteristics of a Circular Slit Diaphragm MEMS Device

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109375

Authors: Tim J. Cheng, Robert D. White, Kasia Oleske

Institutions: Tufts University, Draper Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413321900

FWCI: 2.358

Cites: 10

Cited by: 1

Related to: 10