Work

Development of Piezoelectric 1D Scanning Micromirror Using Magnesium as a Structural Layer

Year: 2025

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers61432.2025.11109770

Authors: Youngsun Yun, Chang-Hyeon Ji

Institution: Ewha Womans University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4413321919

FWCI:

Cites: 16

Cited by:

Related to: 10